Study of particulates in AgGeSe thin films deposited by PLD

JOEL BOBADILLA; JUAN MANUEL CONDE GARRIDO; JOSEFINA MARÍA SILVEYRA

Montpellier

Conferencia; European Conference on Applications of Surface and Interface Analysis (ECASIA?17); 2017

ChimieParisTech, Université de París, Pantheon Sorbonne

We investigated the dependence of particulates, in AgGeSe thin films deposited on Si wafers, with PLD parameters. Chalcogenide glasses doped with silver have interesting properties for many applications, including their use as ionic sensors, solid state memories, and radiation sensors. As engineers develop more compact devices, the demand grows for thin film rather than bulk form. Pulsed laser deposition (PLD) is a technique for fabricating thin films that in spite of allowing the stoichiometric transfer of mass from the target to the substrate, presents particulates at the surface of the films, especially for Ag-doped glasses.