Future Developments at the XRF Beamline of the LNLS Combining Grazing-Emission Conditions with the µXRF Technique

C. A. PÉREZ; HECTOR JORGE SANCHEZ

Campinas (Brasil)

Congreso; RAU 16; 2006

Most of x-ray analyses are used to study bulk material, and the surface sensitivity of an x-ray analysis is typically low compared with techniques using electrons and ions. The grazing incidence condition, however, has been used to extend the x-ray techniques to characterize surfaces owing to the extremely shallow penetration of the incident x-rays under total re°ection condition. For surface analysis spatial resolution is sometimes required. According to the optical reciprocity theorem, grazing-exit condition provides the same information as that obtained under grazing-incidence condition. In order to maintain spatial resolution and surface sensitivity the use of this grazing-exit instead of grazing incident conditions is useful. This work pretends to describe the GE-XRF technique showing some advantages in comparison with the grazing-incidence XRF (GI-XRF) mode. It will be also presented the experimental setup, still under development at the XRF Fluorescence beamline of the LNLS, which will combine GE-XRF and micro-XRF technique. Some applications of the technique focusing in chemical surfaces analyses will also be discussed.