Depth Profiling Surface Analysis of Layered Thin Films Combining Grazing-Exit X-ray Fluorescence and Synchrotron Radiation X-Ray Microprobe

C. A. PÉREZ; H. J. SÁNCHEZ; E. AVENDANO; A. GOBBI; G. AZEVEDO

Campinas, Brasil

Congreso; RAU 17; 2007

LNLS

Characterization techniques sensitive to the chemical and physical properties of thematerial surface are of key importance in modern science and technology. The useof grazing-incident (GI) condition, introduced in di®erent x-ray research ¯elds, hasenabled surface characterization of materials due to the small penetration depth ofx-rays under total external re°ection condition. Surface characterization techniquesoften need spatial resolution in order to be able to analyze their properties in dif-ferent points. This is actually an intrinsic limitation of the GI excitation conditionin which the collected information normally comes from a large area of the samplesurface.Becker et al. have pointed out that grazing-exit (GE) experiments also provides thesame information as GI experiments, according to the optical reciprocity theorem.Since in this case the excitation is normal to the sample surface, the combinationof GE-XRF and synchrotron radiation x-ray microprobe permits surface-sensitiveanalysis with spatial resolution.In this work, we will describe the experimental setup mounted at the LNLS XRFFluorescence beamline for combined GE-XRF condition with a synchrotron radi-ation x-ray microbeam. Preliminary results from the measurements of patterns oflayered thin ¯lms samples deposited by sputtering on silicon substrate will be alsoreported. Some results on the study of di®usion processes at the layers interfaceafter thermal treatment of the samples will also be discussed.