Radiation effects on high-K dielectrics. Measurement technique and first results

SAMBUCO SALOMONE, L.; KASULÍN, A.; GARCIA INZA, M.; LIPOVETZKY, J.; REDIN, E. G.; CARBONETTO, S.; CAMPABADAL, F.; FAIGON, A.

Montevideo

Conferencia; 4th Argentine School of Micro-Nanoelectronics Technology and Applications (EAMTA), 2010; 2010

The radiation response of MOS capacitors with HfO2 as insulator was investigated. The development of instrumental for such goal is presented. First results and analysis are presented.