Quantification of Multilayer Samples by Confocal µXRF

R.D. PÉREZ; H. J. SÁNCHEZ; M. RUBIO; C. A. PÉREZ

AIP CONFERENCE PROCEEDINGS

American Institute of Physics

Año: 2009 vol. 1092 p. 107 - 111

0094-243X

<!-- /* Font Definitions */ @font-face {font-family:"Cambria Math"; panose-1:2 4 5 3 5 4 6 3 2 4; mso-font-charset:0; mso-generic-font-family:roman; mso-font-pitch:variable; mso-font-signature:-1610611985 1107304683 0 0 159 0;} /* Style Definitions */ p.MsoNormal, li.MsoNormal, div.MsoNormal {mso-style-unhide:no; mso-style-qformat:yes; mso-style-parent:""; margin:0cm; margin-bottom:.0001pt; mso-pagination:widow-orphan; font-size:13.0pt; mso-bidi-font-size:10.0pt; font-family:"Times New Roman","serif"; mso-fareast-font-family:"Times New Roman"; mso-ansi-language:PT-BR; mso-fareast-language:PT-BR;} p.MsoBodyTextIndent, li.MsoBodyTextIndent, div.MsoBodyTextIndent {mso-style-noshow:yes; mso-style-unhide:no; mso-style-link:"Sangría de texto normal Car"; margin-top:4.0pt; margin-right:0cm; margin-bottom:0cm; margin-left:0cm; margin-bottom:.0001pt; text-align:justify; text-indent:35.45pt; mso-pagination:widow-orphan; font-size:10.0pt; font-family:"Times New Roman","serif"; mso-fareast-font-family:"Times New Roman"; mso-ansi-language:EN-US; mso-fareast-language:PT-BR;} span.SangradetextonormalCar {mso-style-name:"Sangría de texto normal Car"; mso-style-noshow:yes; mso-style-unhide:no; mso-style-locked:yes; mso-style-link:"Sangría de texto normal"; mso-ansi-language:EN-US; mso-fareast-language:PT-BR;} .MsoChpDefault {mso-style-type:export-only; mso-default-props:yes; font-size:10.0pt; mso-ansi-font-size:10.0pt; mso-bidi-font-size:10.0pt;} @page Section1 {size:612.0pt 792.0pt; margin:70.85pt 3.0cm 70.85pt 3.0cm; mso-header-margin:36.0pt; mso-footer-margin:36.0pt; mso-paper-source:0;} div.Section1 {page:Section1;} --> The confocal setup consists of X-ray lenses in the excitation as well as in the detection channel. In this configuration, a micro volume defined by the overlap of the foci of both x-ray lenses is analyzed. Scanning this micro volume through the sample, 1-3 dimensional studies can be performed. For intermediate thin homogeneous layers a scanning in the normal direction to the surface sample provides information of its thickness and elemental composition. For multilayer samples it also provides the order of each layer in the stratified structure.  For the confocal setup, we used a glass monocapillary in the excitation channel and a monolithic half polycapillary in the detection channel. The experiments was carried out at the D09B beamline of the LNLS using white beam. In the present work, a new algorithm was applied to analyze in detail by confocal mXRF a sample of three paint layers on a glass substrate and a sample of lead adhesive tape. Information of thickness and elemental densities was obtained for each layer of these samples using the proposed algorithm.