INVESTIGADORES
SHALOM Diego Edgar
artículos
Título:
A Micromachined Vacuum Triode Using a Carbon Nanotube Cold Cathode
Autor/es:
CHRIS BOWER; DIEGO SHALÓM; WEI ZHU; DANIEL LÓPEZ; GREG P. KOCHANSKI; PETER L. GAMMEL; SUNGHO JIN
Revista:
IEEE TRANSACTIONS ON ELECTRON DEVICES
Editorial:
IEEE
Referencias:
Año: 2002 vol. 49 p. 1478 - 1483
ISSN:
0018-9383
Resumen:
A
fully integrated on-chip vacuum microtriode using carbon nanotubes as field
emitters was constructed laterally on a silicon surface using
microelectromechanical systems (MEMS) design and fabrication principles. Each
electrode in the triode was made of a hinged polycrystalline silicon panel that
could be rotated and locked into an upright position. The device was operated
at a current density as high as 16 A/cm. Although the transconductance was
measured only at 1.3 S, the dc output power delivered at the anode was almost
40 more than the power lost at the grid electrode. The technique combines
high-performance nanomaterials with mature solid-state fabrication technology
to produce miniaturized power-amplifying vacuum devices in an on-chip form,
which could potentially offer a route of integrating vacuum and solid-state
electronics and open up new applications for ``old-fashioned'' vacuum tubes.