INVESTIGADORES
SALCEDO RODRIGUEZ Karen Lizeth
artículos
Título:
Morphological Study Of Palladium Thin Films Deposited By Sputtering.
Autor/es:
K. L. SALCEDO RODRÍGUEZ; C.A. RODRÍGUEZ; F.A. PEREZ; H. RIASCOS
Revista:
Journal of Physics: Conference Series (JPCS)
Editorial:
IOP Publishing
Referencias:
Lugar: Philadelphia; Año: 2011 vol. 274 p. 1 - 6
ISSN:
1742-6588
Resumen:
This paper presents a morphological analysis of thin films of palladium (Pd) deposited on a substrate of sapphire (Al2O3) at a constant pressure of 3.5 mbar at different substrate temperatures (473 K, 523 K and 573 K). The films were morphologically characterized by means of an Atomic Force Microscopy (AFM); finding a relation between the roughness and the temperature. A morphological analysis of the samples through AFM was carried out and the roughness was measured by simulating the X-ray reflectivity curve using GenX software. A direct relation between the experimental and simulation data of the Palladium thin films was found.
