Tilt scanning interferometry: a numerical simulation benchmark for 3D metrology

GALIZZI, GUSTAVO E.; RUIZ, PABLO D.; KAUFMANN, GUILLERMO H.

APPLIED OPTICS

The Optical Society of America

Lugar: Washington, DC; Año: 2009 vol. 48 p. 3184 - 3191

0003-6935

Tilt scanning interferometry (TSI) is a novel experimental technique that allows the measurement of multi-component displacement fields inside the volume of a sample. In this paper, we present a simulation model which allows to evaluate the speckle fields recorded in TSI when this technique is applied to the analysis of semi-transparent scattering materials. The simulation is based on the convolution of the optical impulsive response of the optical system and the incident field amplitude. Different sections of the simulated imaging system are identified and the corresponding optical impulsive responses are determined. In order to evaluate the performance of the proposed model, a rigid body motion is simulated and the corresponding depth-resolved in-plane and out-of-plane change of phase are obtained.