PERSONAL DE APOYO
MARCHI Maria Claudia
artículos
Título:
A comprehensive study of the influence of the stoichiometry on the physical properties of TiOx films prepared by ion beam deposition
Autor/es:
M. CLAUDIA MARCHI; SARA A. BILMES; C.T.M. RIBEIRO; E.A. OCHOA; M. KLEINKE; F. ALVAREZ
Revista:
JOURNAL OF APPLIED PHYSICS
Editorial:
AMER INST PHYSICS
Referencias:
Lugar: New York; Año: 2010 vol. 108 p. 64912 - 64919
ISSN:
0021-8979
Resumen:
A comprehensive study of non-stoichiometry titanium oxide thin films (TiOx, 0.3≤x≤2) prepared by ion beam deposition technique (IBD) is reported. The physical properties of the material are studied by ultraviolet and x-ray photoelectron, Raman, and Fourier transform infrared spectroscopy and atomic force microscopy. An abrupt transition from metallic characteristics to a wide gap semiconductor is observed in a very narrow range of oxygen variation. Concomitantly with this change the crystal structure and morphology suffer remarkable physical properties modifications. This transformation is ascribed to surface-volume energy minimization due to the influence of oxygen determining the size of the TiO2 particles during coalescence.
