Three-Dimensional Electrochemical Lithography in Mesoporous TiO2 Thin Films

M. LINARES; GRANJA, LETICIA; LEVY, PABLO

JOURNAL OF PHYSICAL CHEMISTRY C

AMER CHEMICAL SOC

Lugar: Washington; Año: 2015 vol. 119 p. 28954 - 28960

1932-7447

ABSTRACT: Electrochemical processes at water−titaniainterfaces in TiO2 thin films were studied using conductingtipatomic force microscopy. Mesoporous titania thin filmswere prepared by sol−gel synthesis from molecular precursorswith the addition of surfactants to induce the formation of aporous structure. We found that both three-dimensional localresistance and topography are significantly and irreversiblychanged in the submicrometer range by applying a constantbias voltage, with water playing a fundamental role in thisprocess. The mesoporous structure enhances these effects dueto the highly water accessible porous titania surface, which canbe easily tuned by changing the synthesis procedure. Our findings are important in the development and performance of titania basedelectronic microdevices and could pave the way toward the design of new electrochemical lithography methods.