THEORETICAL AND EXPERIMENTAL STUDY OF THYMINE BASED PHOTORESISTS POLYMERS

J. VICH BERLANGA, N. CASÍS, C. LUCIANI, D. MARTINO, D. ESTENOZ, G. MEIRA

Viña del Mar, Chile

Simposio; ARCHIPOL IV; 2007

Styrene-based biopolymers containing ionic and thymine groups chemically attached to the polystyrene structure were experimental- and theoretically investigated. The ionic groups make the polymer water-soluble, eliminating the environmental and health concerns associated with the use of volatile organic solvents as in conventional photoresist processes. When biopolymers are illuminated with UV light, a photocyclization reaction between adjacent thymines takes place, rendering it water-insoluble. The material obtained is called a photoresist. Vinylbenzyl thymine (VBT) was copolymerized in a batch solution process with vinylbenzyl triethylammonium chloride (VBA) or vinylphenylsulfonic acid sodium salt (SSA), using different comonomers ratios and initiator concentrations.