INVESTIGADORES
CAPELUTO Maria Gabriela
congresos y reuniones científicas
Título:
Interferometric lithography at 47 nm with a table-top laser
Autor/es:
M. G. CAPELUTO; G. VASCHENKO; M.C. MARCONI; M. GRISHAM; C.S. MENONI; J.J. ROCCA
Lugar:
Rio Mar
Reunión:
Congreso; Lasers and Electro-Optics Society, 2004. (LEOS 2004). The 17th Annual Meeting of the IEEE; 2004
Resumen:
we use interferometric lithography to demostrate printing of dense lines as thin as 30nm on polymethyl-metacrylate using the high average power output of a l=46nm compact high repetition rate EUV laser.
