Table top nanopatterning using soft X-ray lasers

M. G. CAPELUTO; P.W. WACHULAK; D. PATEL; M.C. MARCONI; C.S. MENONI; J.J. ROCCA; E.H. ANDERSON; W. CHAO; D.T. ATTWOOD

Berlin.

Conferencia; 10th International Conference on X Ray lasers; 2006

In this work we demostrate a table top nanopatterning tool based on the illumination with compact Soft X-Ray (SXR) laser. Two approches consisting of interferometrci lithography (IL) and de-magnifying imaging using diffractive optics were used. Surface patterning was realized on commercial photoresist covering surfaces up to 50x50 um with exposures of few seconds. Using interferometric lithography features down to 60 nm were obtained