Nanophotonic Atomic Force Microscopy Transducer for Chemical Composition and Thermal Conductivity Measurement

D PEREZ MORELO; SANGMIN AN; JUNGSEOK CHAE; GEORG RAMER; ANDREA CENTRONE; VLADIMIR AKSYUK

Gaithersburg, MD

Encuentro; The Microsystems and Nanotechnology Division Metrology Mini Meeting (Posterfest); 2019

National Institute of Standards and Technology (NIST)

The poster will describe nanophotonic atomic force microscope transducer with high bandwidth and sensitivity. The transducer is applied to photothermal induced resonance (PTIR) measurements, resolving chemical composition at the nanoscale with up to 50x improvement in sensitivity for thin film samples. High transducer bandwidth enables direct measurement of thermal time constants for nanoscale samples and extraction of thermal conductivity (Nano letters 17 (9), 5587-5594).