INVESTIGADORES
MOREL Eneas Nicolas
artículos
Título:
Dimensionalcharacterizationofopaquesampleswitharinginterferometer
Autor/es:
E.N. MOREL; J.R.TORGA
Revista:
OPTICS AND LASERS IN ENGINEERING
Editorial:
Elsevier
Referencias:
Año: 2008 vol. 47 p. 607 - 611
ISSN:
0143-8166
Resumen:
In the present work,we introduce an optical method to characterize opaque samples.The technique combines low coherence interferometry with a ring configuration.This set-up,let us to obtain the thickness of the sample and the topography of both faces simultaneously by measuring the optical path difference with a reference arm.Experimental results in metal gauge blocks up to1 mm are shown.A resolution better than5 mm was obtained.
