Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer.

E. N. MOREL; J. R. TORGA

AIP Conf. Proc.

Año: 2008 vol. 992 p. 793 - 797

0094-243X

We present in this work a method to measure thicknesses of opaque samples. The technique combines the use of low coherence interferometry with a Michelson-Sagnac configuration. This ring set-up let us to measure both faces of the sample simultaneously. So it is possible to obtain the thickness by measuring the optical path difference between a reference and both surfaces of the sample. Experimental results up to 1mm are shown in metal gauge block. A resolution better than 10 microns was obtained. ©2008 American Institute of Physics