Evolution of the Quadrupole Hyperfine Interaction while milling a Si-HfO2 blend

CECILIA Y. CHAIN; S.FERRARI; LAURA C. DAMONTE; JORGE A. MARTINEZ; ALBERTO F. PASQUEVICH

JOURNAL OF ALLOYS AND COMPOUNDS

ELSEVIER SCIENCE SA

Lugar: Amsterdam; Año: 2012 vol. 536 p. 50 - 54

0925-8388

As HfO2 appears as a good candidate to replace SiO2 in Si complementary metal-oxide-semiconductor devices, a refined knowledge of the possible solid-state reactions between Si and HfO2 is valuable. Being the Perturbed Angular Correlations technique a very sensitive method to detect small changes in solid state, the goal of this work is to follow the different stages that occur while ball milling ablendSi-HfO2 by inspecting the hyperfinequadrupoleinteraction at Hf sites. The characterization is complemented by X-ray diffraction analysis. For comparison, a similar study on pure m-HfO2 is carried out. The results seem to reveal a gradual incorporation of Si in a tetragonal defective phase of hafnia with milling time. In addition, the formation of precursor arrays of the HfSiO4 structure takes place. After an annealing at 1000 °C an important amount of crystalline hafnon appears.