Monte Carlo Simulations of the Superconformal Filling of Nanocavities

A. DE VIRGILIIS; O. AZZARONI; R. C. SALVAREZZA; E. V. ALBANO

Granada (Espana)

Workshop; 7th Granada Seminar: Modeling of Complex Systems; 2002

It is shown that the superconformal filling (SCF) efficiency (SCF) of nanoscale cavities by a deposited material can be rationalized in terms of relevant physical and geometrical parameters. Based on extensive numerical simulations and using the dynamic scaling theory of interface growth, it is concluded that the relevant quantity for the evaluation of SCF is the so-called physical aspect ratio SP = L/M/, where () is the roughness (growth) exponent that governs the dynamics evolution of the system and L (M) is the typical depth (width) of the cavity. The theoretical predictions are in excellent agreement with recently reported experimental data for the SCF of electrodeposited copper and chemically deposited silver in confined geometries, thus giving the basis of a new tool to manage nanoengineering-related problems not completely resolved so far