INVESTIGADORES
DE VIRGILIIS Andres
artículos
Título:
A Novel Predictive Tool in Nanoengineering: Straightforward Estimation of Superconformal Filling Efficiency
Autor/es:
A. DE VIRGILIIS; O. AZZARONI; R. C. SALVAREZZA; E. V. ALBANO
Revista:
APPLIED PHYSICS LETTERS
Editorial:
American Institute of Physics
Referencias:
Año: 2003 vol. 82 p. 1953 - 1955
ISSN:
0003-6951
Resumen:
It is shown that the superconformal filling (SCF) efficiency
($\epsilon_{SCF}$) of nano-scale cavities can be rationalized in terms of
relevant physical and geometric parameters. Based on extensive numerical
simulations and using the dynamic scaling theory of interface growth, it is
concluded that the relevant quantity for the evaluation of $\epsilon_{SCF}$ is
the so-called "physical" aspect ratio $S_{P} = L/M^{\beta/\alpha}$, where
$\alpha$ ($\beta$) is the roughness (growth) exponent that governs the dynamic
evolution of the system and $L$ ($M$) is the typical depth (width) of the
cavity. The theoretical predictions are in excellent agreement with recently
reported experimental data for the SCF of electrodeposited copper and
chemically deposited silver in confined geometries, thus giving the basis of a
new tool to manage nanoengineering-related problems not completely resolved so
far.
