Electrochemical Deposition onto Self Assembled Monolayers: New Insights into Micro- and Nanofabrication

PATRICIA L. SCHILARDI; PATRICIO DIP; PAULA C. DOS SANTOS CLARO; GUILLERMO A. BENITEZ; MARIANO H. FONTICELLI; OMAR AZZARONI; ROBERTO C. SALVAREZZA

CHEMISTRY-A EUROPEAN JOURNAL

Wiley-VCH Verlag GmbH&Co.

Lugar: Weinheim; Año: 2005 vol. 12 p. 38 - 49

0947-6539

Pattern transfer with high resolution is a frontier topic in the emerging fieldof nanotechnologies. Electrochemical molding is a possible route for nanopatterning metal, alloys andoxid e surfaces with high resolution in a simple andinexpensiv e way. This method involves electrodeposition onto a conducting master coveredby a self-assembled alkanethiolate monolayer (SAMs). This molecular film enables direct surface–relief pattern transfer from the conducting master to the inner face of the electrodeposit, and also allows an easy release of the electrodeposited film due their excellent anti-adherent properties. Replicas of the original conductive master can be also obtained by a simple two-step procedure. SAM quality and stability under electrodeposition conditions combined with the formation of smooth electrodeposits are crucial to obtain high-quality pattern transfer with sub-50 nm resolution.