Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

VASCHENKO, G.; BREWER, C.; BRIZUELA, F.; WANG, Y.; MIGUEL ANTONIO LAROTONDA; LUTHER, B. M.; MARCONI, M. C.; ROCCA, J. J.; MENONI, C. S.; ANDERSON, E. H.

OPTICS LETTERS

Optical Society of America

Lugar: 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036 USA ; Año: 2006 vol. 31 p. 1214 - 1216

0146-9592

We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution. (c) 2006 Optical Society of America.