INVESTIGADORES
CASTEZ Marcos Federico
artículos
Título:
A theoretical framework to obtain interface?s shapes during the high-temperature annealing of high-aspect-ratio gratings
Autor/es:
MARCOS F. CASTEZ; ROBERTO C. SALVAREZZA; JUN NAKAMURA; KOICHI SUDOH
Revista:
APPLIED PHYSICS LETTERS
Editorial:
AMER INST PHYSICS
Referencias:
Lugar: New York; Año: 2010 vol. 97 p. 123104 - 123106
ISSN:
0003-6951
Resumen:
High-temperature annealing applied to solid samples produces important morphological modfications on their surfaces, particularly in high-aspect-ratio gratings. We show, how by means of a framework based in a nonlinear analysis of the Mullins´ equation J. Appl. Phys. 28, 333 (1957), we can mathematically reproduce surface´s shapes just by measuring a few characteristic features of the interfaces essentially pattern´s amplitudes and wavelengths. We compared our results with experimental data on silicon samples, finding a close agreement between experimental shapes and those theoretically predicted. The introduced framework could be particularly useful in those situations where no cross-sectional information were available.
