Monte Carlo Simulation of Electron Backscattering in Solids Using a General-Purpose Computer Code

E. ACOSTA; E. COLEONI; G. CASTELLANO; J. RIVEROS; J. FERNÁNDEZ-VAREA; F. SALVAT

Scanning Microscopy

AMF O'Hare

Lugar: Chicago; Año: 1996 vol. 10 p. 625 - 638

0891-7035

A Monte Carlo study of backscattering of kilovolt electrons in solids, a process of primary importance in electron microscopy and surface analytical techniques, is carried out. Simulations have been performed using the general-purpose simulation code PENELOPE (an acronym for "Penetration and ENErgy LOss of Positrons and Electrons"), which generates electron-photon showers in arbitrary materials. A systematic comparison of results from PENELOPE with available experimental data, and with results from simulations with a much more sophisticated code, is given for electron beams with energies between 2.5 and 60 keV and elemental solids with atomic numbers Z=4 to 92. It is concluded that PENELOPE gives a reliable description of the backscattering process, even for relatively low electron energies and thin targets.