Mechanisms of pyramidal etch hillocks formation in a Kossel crystal

C.M. ALDAO, M.P. SUÁREZ, Y D.A. MIRABELLA

Córdoba

Congreso; II Encuentro de Física y Química de Superficies, Córdoba; 2006

Etch hillocks formation was studied experimentally and modeled using the Monte Carlo method for a Kossel crystal.  Simulations were used to explore possible formation mechanisms for the appearance of etch hillocks in two and three dimensions.  Comparison with pyramidal etch hillocks that are regularly observed in anisotropic etching of Si(100) are presented.