INTEMA   05428
INSTITUTO DE INVESTIGACIONES EN CIENCIA Y TECNOLOGIA DE MATERIALES
Unidad Ejecutora - UE
artículos
Título:
Basic mechanisms for hillock formation during etching
Autor/es:
D.A. MIRABELLA, M.P. SUÁREZ, Y C.M. ALDAO
Revista:
PHYSICA A - STATISTICAL AND THEORETICAL PHYSICS
Referencias:
Año: 2008 vol. 387 p. 1957 - 1962
ISSN:
0378-4371
Resumen:
The formation of etch hillocks was explored in the framework of a site-dependent detachment probabilities model.  Monte Carlo simulations were carried out for a one-dimensional substrate within a restricted-solid-on-solid model in which only first neighbor interactions were considered.  We specifically focus on describing the dynamics that lead to hillock-and-valley patterns.  The mechanisms responsible for the steady state morphologies are related to apex creation and annihilation, together with valley and hillock etching, but pattern formation reflects two feedback loops that interrelate these mechanisms.