Dirt Reference Standard for surface cleanliness measurements

DANIEL J. O. ORZI; GABRIEL M. BILMES

APPLIED PHYSICS. A - MATERIALS SCIENCE AND PROCESSING

SPRINGER

Lugar: Berlin; Año: 2016

0947-8396

Thin films based on polymer poly(isobutylmethacrylate) (PIBMA), doped with carbon black particles deposited on steel plate substrates are proposed as dirt reference standards for cleanliness accreditation methods, particularly for instruments based on laser ablation. The films were made with the spin-coating method, obtaining layers with thickness between 4 and 17 microns. Carbon black particles with sizes smaller than 100 nm and concentrations between 1 and 27.6 mgr/cm3 were used. Characterization of the films was made by using absorbance measurements and laser ablation-induced photoacoustic.