Fabrication of Silicon Nitride Integrated Circuits by Direct Writing Laser at CNEA: Preliminary Results.

MAURICIO TOSI; JEFFRY H. MARTÍNEZ VALDIVIEZO; ROBERTO PEYTON; ALEJANDRO FASCISZEWKI; GUSTAVO ADRIAN TORCHIA; NICOLÁS ABADÍA; JORGE PARRA ; PABLO SANCHIS; LAUREANO A. BULUS-ROSSINI; PABLO. A COSTANZO-CASO

Paris

Conferencia; European Conference of Integrated Optics ECIO 2020; 2020

Saclay University

We report our first results in the fabrication of photonic integrated circuits in silicon nitride platform by laser direct writing. These are novel and preliminary results in the area of micro-fabrication of photonic integrated circuits in Argentina and the Latin-American region. We were able to demonstrate the feasibility to carry out a maskless high-resolution lithography via a low cost process.