Characteristics of a small PIIID system using a cathodic arc built at INFIP

ADRIANA MÁRQUEZ; ARIEL KLEIMAN; ANDREA DEL VALLE; MARIANA FAZIO; HÉCTOR KELLY; DIEGO G LAMAS

Sâo José dos Campos

Workshop; 10th International Workshop on Plasma Based Ion Implantation and Deposition; 2009

Plasma immersion ion implantation combined with deposition using cathodicarcs as the plasma source has demonstrated to be useful for the fabrication of dense plasma coatings with improved tribologicaland mechanical properties. A small plasma immersion ion implantation and deposition (PIIID) system for research purposes was built at INFIP with a dc cathodicarc as the plasma source.