Recent Advances on Nanocomposite Resists With Design Functionality for Lithographic Microfabrication

MARTÍNEZ, E. D.; PRADO, A.; GONZALEZ, M.; ANGUIANO, S.; TOSI, L.; SALAZAR ALARCÓN, L.; PASTORIZA, H.

Frontiers in Materials

Frontiers

Año: 2021 vol. 8

Nanocomposites formed by a phase-dispersed nanomaterial and a polymeric host matrixare highly attractive for nano- and micro-fabrication. The combination of nanoscale andbulk materials aims at achieving an effective interplay between extensive and intensivephysical properties. Nanofillers display size-dependent effects, paving the way for thedesign of tunable functional composites. The matrix, on the other hand, can facilitate oreven enhance the applicability of nanomaterials by allowing their easy processing fordevice manufacturing. In this article, we review the field of polymer-based nanocompositesacting as resist materials, i.e. being patternable through radiation-based lithographicmethods. A comprehensive explanation of the synthesis of nanofillers, theirfunctionalization and the physicochemical concepts behind the formulation ofnanocomposites resists will be given. We will consider nanocomposites containingdifferent types of fillers, such as metallic, magnetic, ceramic, luminescent and carbon-based nanomaterials. We will outline the role of nanofillers in modifying various propertiesof the polymer matrix, such as the mechanical strength, the refractive index and theirperformance during lithography. Also, we will discuss the lithographic techniquesemployed for transferring 2D patterns and 3D shapes with high spatial resolution. Thecapabilities of nanocomposites to act as structural and functional materials in novel devicesand selected applications in photonics, electronics, magnetism and bioscience will bepresented. Finally, we will conclude with a discussion of the current trends in this field andperspectives for its development in the near future.