INVESTIGADORES
STEREN Laura beatriz
artículos
Título:
The kinetic growth of paladium silicide
Autor/es:
LAURA B. STEREN; RICARDO VIDAL; JULIO FERRON
Revista:
APPLIED SURFACE SCIENCE
Editorial:
ELSEVIER SCIENCE BV
Referencias:
Año: 1987 vol. 29 p. 418 - 426
ISSN:
0169-4332
Resumen:
We have measured the evolution of a palladium/silicon interface under consecutive annealing periods, performed at 200°C in UHV conditions. The interface was analyzed by means of Auger electron spectroscopy combined with factor analysis applied in a sequential way. We found that silicide appears only after annealing and evolves until all the palladium is consumed. A silicon compound different from silicide, identified as PdxSi with x<2 is found at the interface Pd/Si and Pd2Si/Si, before and after annealing respectively.
