INVESTIGADORES
GRONDONA Diana Elena
artículos
Título:
Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter
Autor/es:
L GIULIANI; D GRONDONA; H KELLY; F MINOTTI
Revista:
PHYSICA SCRIPTA
Editorial:
IOP PUBLISHING LTD
Referencias:
Año: 2008 vol. T131 p. 14032 - 14035
ISSN:
0281-1847
Resumen:
In vacuum arcs of interest for film deposition the ion kinetic energy is of importance because it
influences the coating properties. In this kind of discharge, the ions come out from the cathode
spots with a high kinetic energy (20?150 eV). In the present work, we present measurements
of vacuum arc ion energy distributions in a pulsed vacuum arc with a straight magnetic filter.
A retarding field analyser (RFA) was used to perform the measurements that were carried out
with a variable magnetic field strength (of the order of 10 mT). Since the interpretation of the
results obtained from the RFA lies in the knowledge of the plasma and floating potential
values, we have employed also Langmuir probes for determining those quantities. The
obtained results for the ion kinetic energy are similar to those reported by other authors, but
they were also found to be independent of the magnetic field strength. The electron
temperature was also found to be independent of the magnetic field strength and of the axial
position along the filter, indicating the absence of collisions.