INVESTIGADORES
SERQUIS Adriana Cristina
artículos
Título:
Structural and dielectric properties of Al2O3 thin film
Autor/es:
A. SERQUIS ; R.ZIMMERMAN
Revista:
JOURNAL OF PHYSICS CONDENSED MATTER
Editorial:
IOP PUBLISHING LTD
Referencias:
Lugar: Londres; Año: 1993 vol. 5 p. 321 - 322
ISSN:
0953-8984
Resumen:
Al2O3 layers have been obtaied by vapour evaporation and their suface morphology has been investigated by TEM and HEED. The relation with capitance is discussed.