INVESTIGADORES
ARCE roberto Delio
artículos
Título:
ANOMALOUS INCORPORATION OF FLUORINE IN TIN OXIDE FILMS PRODUCED WITH THE PYROSOL METHOD
Autor/es:
J. FERRÓN; R.D. ARCE
Revista:
THIN SOLID FILMS
Editorial:
ELSEVIER SCIENCE SA
Referencias:
Lugar: Amsterdam; Año: 1991 vol. 204 p. 405 - 411
ISSN:
0040-6090
Resumen:
Using secondary ion mass spectrometry, we have studied the non-intentional (chlorine) and intentional (fluorine) doping of tin oxide produced by the pyrosol method. We found that both kinds of doping are dependent on the substrate temperature, but in rather different ways. The chlorine concentration decays exponentially with the substrate temperature, while the fluorine concentration presents a maximum around 350 °C. We suggest that the higher stability of fluorine as dopant, when compared with chlorine, is responsible for this difference. We have performed a Monte Carlo simulation which supports this suggestion.
