CHARACTERIZATION OF FLUORINE-DOPED TIN OXIDE PRODUCED BY THE PYROSOL METHOD

B. GOTTLIEB; R.R. KOROPECKI; R.D. ARCE; R. CRISALLE; J. FERRÓN

THIN SOLID FILMS

ELSEVIER SCIENCE SA

Lugar: Amsterdam; Año: 1991 vol. 199 p. 13 - 21

0040-6090

We present results on the electrical and optical properties of tin oxide films deposited by the pyrolysis of an aerosol which was produced by the ultrasonic vibration ofan SnCl, solution. NH,F was added to the solution in order to dope the films with fluorine. The deposition temperature for different fluorine concentrations was varied between 300 and 450 “C. Films with a resistivity of 5 x lop4 R cm were obtained with a 10% (by weight) concentration of F: Sn in the solution. An increase in the fluorine concentration above this value led to a degradation of the electronic properties of the film. The final concentrations offluorine in the films were measured by secondary ion mass spectrometry.