INVESTIGADORES
ARCE roberto Delio
artículos
Título:
The first stages of oxidation of a .. Si studied with Auger electron spectroscopy
Autor/es:
R. VIDAL; R. R. KOROPECKI; R.D. ARCE; J. FERRÓN
Revista:
JOURNAL OF APPLIED PHYSICS
Editorial:
AMER INST PHYSICS
Referencias:
Lugar: New York; Año: 1987 vol. 62 p. 1054 - 1058
ISSN:
0021-8979
Resumen:
We have studied the first stages of low-pressure oxidation of amorphous silicon using Auger electron spectroscopy. The application of the principal component analysis to the Si L 23 corevalence-valence transition spectra, acquired during the oxidation, allows us for the interpretation of the oxidation kinetics of the a-Si. Using the target transformation method we have isolated the Auger spectra of the components present during the oxidation process. We observe an intermediate state in the 8i.Si02 interface formed during the oxidation. This state was attributed to a SiOx -type compound.
