INVESTIGADORES
VIDAL ricardo Alberto
artículos
Título:
The first stages of oxidation of a-Si studied with Auger electron spectroscopy
Autor/es:
R. VIDAL; R. KOROPECKI; R. ARCE; J. FERRÓN
Revista:
JOURNAL OF APPLIED PHYSICS
Editorial:
American Institute of Physics
Referencias:
Año: 1987 vol. 62 p. 1054 - 1058
ISSN:
0021-8979
Resumen:
We have studied the first stages of low-pressure oxidation of amorphous silicon using Auger electron spectroscopy. The application of the principal component analysis to the Si L2,3 core-valence-valence transition spectra, acquired during the oxidation, allow us for the interpretation of the oxidation kinetics of the a-Si. Using the target transformation method we have isolated the Auger spectra of the components present during the oxidation process. We observe an intermediate state in the Si-SiO2 interface formed during the oxidation. This state was attributed to a SiOx -type compound.