Backscattering correction to depth profiling of interfaces

VIDAL, R; FERRÓN J.; BUITRAGO, R.H.

Applications of Surface Science

Elsevier

Lugar: Amsterdam; Año: 1984 vol. 20 p. 145 - 153

0378-5963

We have performed Monte Carlo calculations of Auger yields of thin overlayers as a function of their thicknesses. This problem resembles an ideal depth profiling with no ion beam effects present. We found that in addition to the escape depth broadening, the backscattering effect must be considered in order to reproduce the analyzed depth profile. We propose a very simplified deconvolution formula which takes account of the backscattering effect, improving the in-depth resolution of the depth profile.