Simulation of a Silicon CVD Spouted Fluidized Bed Reactor: Semi-Batch Operations

PIÑA, JULIANA; BUCALÁ, VERÓNICA; SCHBIB, SUSANA; EGE, PAUL; DE LASA, HUGO

Vancouver, Canada

Congreso; The 12th International Conference on Fluidization - New Horizons in Fluidization Engineering; 2007

The University of Western Ontario, London, Canada; The University of British Columbia

A comprehensive multiphase gas-solid mathematical model that successfully describes the batch growth of silicon particles in a chemical vapor deposition (CVD) submerged spouted bed reactor is extended to simulate semibatch operations with periodic seeds additions and product extractions. This model takes into account the fluidized bed reactor as well as a population balance equation representing particle growth and agglomeration. Experimental data obtained from semi-batch operation in a pilot scale reactor at REC Silicon Inc. are used to evaluate the proposed mathematical model.