INVESTIGADORES
PASSEGGI mario Cesar Guillermo
congresos y reuniones científicas
Título:
Kinetics of the oxidation of GaAs(100) at high pressure: an Auger electron spectroscopy study
Autor/es:
PASSEGGI (JR.), M.C.G.; KOROPECKI, R.R.; FERRÓN, J.; MOLINAS, B.; GUADALUPI, G.M.
Lugar:
Rosario (Santa Fe), Argentina, 14-18 Septiembre
Reunión:
Jornada; Jornadas SAM1998, IBEROMET V; 1998
Institución organizadora:
Sociedad Argentina de Metales
Resumen:
The time evolution of a GaAs(100) ?epi-ready? wafer exposed to air at normal conditions of pressure and temperature has been studied by means of Auger electron spectroscopy and argon-ion depth profiling. Our results show that the oxygen signal near the surface evolves during times as long as 5 months. The evolution of the oxygen signal is accompanied by the penetration of an oxidation front as the air exposure increases. This behavior is confirmed from different indicators obtained through the study of the low-energy Auger line-shape spectra.