INVESTIGADORES
PASSEGGI mario Cesar Guillermo
artículos
Título:
Auger electron spectroscopy and principal component analysis of the first stages of oxidation in GaAs(100)
Autor/es:
PASSEGGI (JR.), M.C.G.; VAQUILA, I.; FERRÓN, J.
Revista:
SURFACE AND INTERFACE ANALYSIS
Editorial:
John Wiley & Sons Inc
Referencias:
Lugar: Malden, USA; Año: 1993 vol. 20 p. 761 - 765
ISSN:
0142-2421
Resumen:
The first stages of oxidation in GaAs(100) have been studied using Auger electron spectroscopy and principal component analysis. We found that at low oxygen exposures (<104 Langmuirs) and in the presence of excited oxygen produced by electron bombardment, GaAs oxidizes via a one-phase process only. This phase involves the simultaneous oxidation of both the elements Ga and As.
