On the calculation of viscous damping of microbeam resonators in air

BERLI, C.; ALBERTO CARDONA

JOURNAL OF SOUND AND VIBRATION

Elsevier

Año: 2009 vol. 327 p. 249 - 253

0022-460X

Theoretical aspects concerning the calculation of the air damping of microbeam resonators in the framework of continuum fluid mechanics are discussed. A closed relationship between Knudsen and Reynolds numbers is derived, which indicates that the no-slip flow regime is attained in systems that operate at high Reynolds numbers only, while systems that operate at low Reynolds numbers invariably enter the slip flow regime. These observations are significant to improve the modelling and simulation of microbeam resonators integrated to micro-electromechanical systems (MEMS). In addition, analytical expressions of the viscous damping coefficients for different flow regimes are discussed in relation to experimental data.