Métodos de medición de espesores de películas delgadas basadas en óxidos semiconductores

EDGAR VILLEGAS; RODRIGO PARRA; RAMAJO, LEANDRO ALFREDO

REVISTA MEXICANA DE FíSICA

SOC MEXICANA FISICA

Lugar: Mexico; Año: 2018 vol. 64 p. 364 - 367

0035-001X

Transparent films based on Ti, Sn and Zn oxides are of great importance in electronic devices such as sensors, solar cells and conductivefilms, then the characterization techniques are highly relevant. The aim of this work is to identify the advantages and disadvantages of directmethods, such as profilometry, and indirect methods such as ellipsometry and spectrophotometry used to quantify film thickness. In this work,films were deposited by spray-pyrolysis on glass substrates at 425◦C. Thicknesses varied between 150 and 300 nm. Thicknesses calculatedby means of spectrophotometry and ellipsometry, led to differences below 10 % and 20 %, respectively, with respect to the value measuredby profilometry.