Surface morphology of AgGeSe thin films deposited by PLD

J BOBADILLA; JM SILVEYRA; JM CONDE GARRIDO

Saint Malo

Congreso; PNCS-ESG 2018; 2018

Pulsed laser deposition (PLD) is a techniquefor fabricating thin films that, because of its simplicity, offers greatexperimental versatility. It allows the stequiometric transfer of mass from thetarget to the substrate and the physical properties of the films are, in manycases, superior to those obtained by other techniques.The main limit for the application of PLD inmicro/nano-devices is the presence of particulate at the surface of (andsometimes even inside) the films.For this work, we deposited thin films by PLD ofthe AgGeSe system on Si wafers. We tested various deposition parameters andstudied the films through SEM. We present images of the surface of the filmsand study the distribution of particulates.We found that the largest particulatesoriginate from the tips of the cones that form at the target?s surface duringthe ablation.