CONICET | Buscador de Institutos y Recursos Humanos

Contaminants can enter vacuum systems from two main sources: backstreaming of oil vapors from the diffusion and mechanical pumps, and vapors generated as byproducts in the process chamber. Both sources can be hindered by using an appropriate baffle.We developed a virtual prototype of a low-cost baffle for vacuum systems that is cooled down with thermoelectric coolers (TECs). Compared to compressor cooling systems, TECs have useful advantages for this application: they are compact, silent, vibration-free, almost maintenance-free, inexpensive, widely commercially available, and capable of providing a precise temperature control. The baffle is partly built inside a tee vacuum fitting. A refrigerated cooper helix provides the trapping surfaces for contaminants flowing between the process chamber and the vacuum pumps. The cost of the baffle is below USD 250.The proof-of-concept model, implemented by the finite element method, showed that, when using TEC1-12706 modules, the helix can reach temperatures as low as −50 °C. According to our analysis, this temperature is more than enough for trapping the contaminants described above.