A new combined method to make microcavities in Silicon wafer (100)

CINTHYA TORO; B. LERNER; PEREZ, MAXIMILIANO; CARLOS LASORSA; CARLOS A. RINALDI; BOSELLI, ALFREDO; LAMAGNA, ALBERTO

Takamatsu, Kagawa,

Congreso; The 12th International Symposium on Laser Precision Microfabrication; 2011

National Institute of Advanced Industrial Science and Technology, Japan

Our contribution is to develop an efficient method for manufacturing micro structures, providing high quality, repeatability and optimal use of the microfabrication tools. In this paper we show the first results of the control parameters of the geometries and sizes of the micro-and macro-structures, with 90 % repeatability using a nanosecond laser to open a hole over silicon wafer covered with a thin film of Si3N4 and applying selective etching of crystalline silicon.