Detecting plasma produced by laser in a micromachining system as in- process control

CINTHYA TORO; CARLOS LASORSA; CARLOS A. RINALDI

Takamatsu, Kagawa,

Congreso; The 12th International Symposium on Laser Precision Microfabrication; 2011

National Institute of Advanced Industrial Science and Technology, Japan

Automated systems have been used in industries with high-volume production because automation has led, for example, the possibility to reduce costs, increase productivity, and increase accuracy, among others [1] [2]. It is also known that the processing laser is ideal for all kind control [3]. In this sense, the amount of material removed (plasma produced by laser irradiation of the substrate surface) during the process of machining could be used as a control variable. Therefore using a detector that note this plasma it could control the machining process on gaseous environments. In this work we show the first characterization results of a detector, designed to control the plasma generated during the laser material machining process.