INVESTIGADORES
LAROTONDA Miguel Antonio
congresos y reuniones científicas
Título:
Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers
Autor/es:
MENONI, C. S.; VASCHENKO, G.; BRIZUELA, F.; BREWER, C.; WANG, Y.; MIGUEL ANTONIO LAROTONDA; LUTHER, B. M.; MARCONI, M. C.; ROCCA, J. J.; CHAO, W.
Lugar:
Montreal, Quebèc, CANADA
Reunión:
Congreso; 19th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS); 2006
Institución organizadora:
Laser and Electro Optics Society
Resumen:
In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds. Its spatial resolution has been determined to be 120-150 nm.
