Elemental and Structural X-Ray Microanalysis by Confocal Setup

R.D. PÉREZ; H. J. SÁNCHEZ; C..A. SOSA; C. A. PÉREZ; V. SBARATO; M. RUBIO

Campinas

Congreso; RAU XXI; 2011

The confocal setup consists of x-ray lenses in the excitation as well as in the detec-tion channel. In this configuration, a micro volume defined by the overlap of the fociof both x-ray lenses is analyzed. Scanning this micro volume through the sample, 1-3dimensional studies can be performed. For depth profiling studies, only the scan ofthe confocal volume in the normal direction to the sample is required. An elementalanalysis is obtained by the detection of the x-ray fluorescence produced in the con-focal volume. In addition, Energy Dispersive X-Ray Diffraction analysis (EDXRD)in the confocal volume can be performed using a continuous polychromatic sourceand an appropriated fixed geometry based on a low divergence optic.To implement the confocal setup, we used two monolithic semi-polycapillariesin the excitation and detection channel. The polycapillaries were made by means ofdrawing of multibundles of borosilicate glass capillaries in a heating furnace. Theexperiment was carried out at the D09B beamline of the Brazilian Synchrotron LightLaboratory (Laborat´orio Nacional de Luz S´ıncrotron, LNLS) using white beam. Asilicon drift X-ray detector of 150 eV resolution at 5.9 keV was used for detection ofscattered and characteristic photons. A mean spatial resolution of 90 micrometersfor the three orthogonal axes was obtained. A detailed characterization of our con-focal setup is described in this work. Elemental and structural x-ray microanalysesof stratified samples are shown.Acknowledgements: