Compositional and Structural Depth Profile Analysis by Confocal Micro-XRF

R.D. PÉREZ; H. J. SÁNCHEZ; C..A. SOSA; C. A. PÉREZ; M. RUBIO

Puebla

Congreso; SARX 2010; 2010

The  confocal  setup  consists  of  x-ray  lenses in  the  excitation  as  well  as  in  the  detection  channel.  In  this configuration, a  micro  volume defined  by  the  overlap of  the  foci  of  both  x-ray  lenses is  analyzed.  Scanning this micro  volume  through the  sample,  1-3  dimensional  studies  can be  performed.  For  depth  profiling studies, only the scan of the confocal volume in the normal direction to the sample is required. An elemental analysis is obtained by the detection of the x-ray fluorescence produced in the confocal volume. In addition, Energy  Dispersive  X-Ray  Diffraction  analysis  (EDXRD)  in  the  confocal  volume can  be  performed  using  a continuous polychromatic source and an appropriated fixed geometry based on a low divergence optic. To implement the confocal setup, we used two monolithic semi-polycapillaries in the excitation and detection channel. The polycapillaries were made by means of drawing of multibundles of borosilicate glass capillaries in  a  heating  furnace.  Our last  prototypes