IFLP   13074
INSTITUTO DE FISICA LA PLATA
Unidad Ejecutora - UE
congresos y reuniones científicas
Título:
Evolution of the Quadrupole Hyperfine Interaction while milling a Si-HfO2 Blend
Autor/es:
C.Y. CHAIN; S. FERRARI; L. C. DAMONTE; J.A. MARTINEZ; A.F. PASQUEVICH
Reunión:
Simposio; 18th International Symposium on Metastable, Amorphous and Nanostructured Materials, (ISMANAM 2011); 2011
Resumen:
As HfO2 appears as a good candidate to replace SiO2 in Si complementary metal-oxide-semiconductor devices, a refined knowledge of the possible solid state reactions between Si and HfO2 is valuable. Being the Perturbed Angular Correlation technique a very sensitive method to detect small changes in solid state, the goal of this work is to follow the different stages that occur while ball milling a blend Si-HfO2 by inspecting the hyperfine quadrupole interactions at Hf sites. The characterization is complemented by X-ray diffraction analysis. Results revealed a gradual incorporation of Si in the monoclinic lattice of hafnia with milling time. Si distorts the m-HfO2 phase which becomes precursor arrays of HfSiO4 structure. The fact is confirmed by the formation of important amount of crystalline hafnon after an annealing at moderate temperatures.
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